Motion Control – Sub-micron Position Stage

Forestville, CA, — — High speed, high force, sub-micron, >300 nanometer (1.1811 10-6 in.) positioning resolution, cross roller voice coil stages are self-contained, compact, and can be mounted in a horizontal or vertical axis. The high speed, 20 mm (0.7874 in.) travel, Equipment Solutions’ Motion Control VCS-2020 Voice Coil Stage features a 20 mm dia. aperture. An integrated Analog position feedback sensor assures 100 nanometer (3.937 10-6 in.) repeatability. This compact voice coil stage is ideal for such micro-positioning applications as: Scanning interferometry, disk drive testing, auto focus systems, surface structure analysis, confocal microscopy, biotechnology, and semiconductor test equipment.
The compact 117 mm 75 mm 81 mm (4.60 in. 2.96 in. 3.18 in.), low mass, voice coil stage is a fully self-contained system including a high precision cross roller stage, voice coil actuator, analog position sensor, servo amplifier and servo controller.